3D micro/nanofabrication via laser direct writing


This research area is to develop a single-step laser direct writing technique to achieve designable, high-efficient 3D micro/nanofabrication. The new technique will combine the additive two-photon polymerization (TPP) and the subtractive multi-photon ablation (MPA) into a single-step fabrication process to achieve the comprehensive 3D micro/nanofabrication. The success of this project will enable the fabrication of arbitrary complex 3D micro/nanostructures which are promising for a wide range of applications such as integrated optics, micro-fluidics, and microelectromechanical systems.


Department of Electrical and Computer Engineering
University of Nebraska-Lincoln
209N Scott Engineering Center
P.O. Box 880511
Lincoln, NE 68588-0511, USA


Phone: (402) 472-3771
Fax:     (402) 472-4732

Email: ylu2@unl.edu


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